6.777J Design and Fabrication of Microelectromechanical Systems
Provides an introduction to microsystem design. Covers material properties, microfabrication technologies, structural behavior, sensing methods, electromechanical actuation, thermal actuation and control, multi-domain modeling, noise, and microsystem packaging. Applies microsystem modeling, and manufacturing principles to the design and analysis a variety of microscale sensors and actuators (e.g., optical MEMS, bioMEMS, and inertial sensors). Emphasizes modeling and simulation in the design process. Students taking the graduate version complete additional assignments. 4 Engineering Design Points.
6.777J will be offered this semester (Spring 2019). It is instructed by D. Weinstein.
This class counts for a total of 12 credits. This is a graduate-level class.
You can find more information at the 6.777 Home Page site.
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