6.777[J] Design and Fabrication of Microelectromechanical Systems


Class Info

Provides an introduction to microsystem design. Covers material properties, microfabrication technologies, structural behavior, sensing methods, electromechanical actuation, thermal actuation and control, multi-domain modeling, noise, and microsystem packaging. Applies microsystem modeling, and manufacturing principles to the design and analysis a variety of microscale sensors and actuators (e.g., optical MEMS, bioMEMS, and inertial sensors). Emphasizes modeling and simulation in the design process. Students taking the graduate version complete additional assignments. 4 Engineering Design Points.

This class has 6.003, and 2.003 as prerequisites.

6.777[J] will not be offered this semester. It will be instructed by D. Weinstein.

This class counts for a total of 12 credits. This is a graduate-level class.

You can find more information on MIT OpenCourseWare at the Design and Fabrication of Microelectromechanical Devices site or on the 6.777[J] Stellar site.

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