6.717J Design and Fabrication of Microelectromechanical Systems
Provides an introduction to microsystem design. Covers material properties, microfabrication technologies, structural behavior, sensing methods, electromechanical actuation, thermal actuation and control, multi-domain modeling, noise, and microsystem packaging. Applies microsystem modeling, and manufacturing principles to the design and analysis a variety of microscale sensors and actuators (e.g., optical MEMS, bioMEMS, and inertial sensors). Emphasizes modeling and simulation in the design process. Students taking the graduate version complete additional assignments. 4 Engineering Design Points.
6.717J will be offered this semester (Spring 2019). It is instructed by D. Weinstein.
This class counts for a total of 12 credits.
You can find more information at the 6.717J site.
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