6.717[J] Design and Fabrication of Microelectromechanical Systems


Class Info

Provides an introduction to microsystem design. Covers material properties, microfabrication technologies, structural behavior, sensing methods, electromechanical actuation, thermal actuation and control, multi-domain modeling, noise, and microsystem packaging. Applies microsystem modeling, and manufacturing principles to the design and analysis a variety of microscale sensors and actuators (e.g., optical MEMS, bioMEMS, and inertial sensors). Emphasizes modeling and simulation in the design process. Students taking the graduate version complete additional assignments. 4 Engineering Design Points.

This class has 6.003, and 2.003 as prerequisites.

6.717[J] will not be offered this semester. It will be instructed by D. Weinstein.

This class counts for a total of 12 credits.

You can find more information at the Advanced Undergraduate Subjects site.

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Advanced Undergraduate Subjects
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systems introduction computational subjects algorithms database systems intelligent multimodal user interfaces motion 6.685 electric machines fabrication of microelectromechanical systems

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