6.152 Micro/Nano Processing Technology


Class Info

Introduces the theory and technology of micro/nano fabrication. Includes lectures and laboratory sessions on basic processing techniques such as vacuum processes, lithography, diffusion, oxidation, and pattern transfer. Students fabricate solar cells, MEMS cantilevers, and microfluidic mixers. Emphasizes interrelationships between material properties and processing, device structure, and the electrical, mechanical, optical, chemical or biological behavior of devices. Provides background for thesis work in micro/nano fabrication. Students engage in extensive written and oral communication exercises.

This class has 18.02, 3.091, 5.111, and 8.02 as prerequisites.

6.152 will be offered this semester (Fall 2017). It is instructed by L. F. Velasquez-Garcia and J. Michel.

Lecture occurs 2:30 PM to 4:00 PM on Mondays and Wednesdays in 32-124.

This class counts for a total of 12 credits. This class counts as a CI-M.

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