6.152 Micro/Nano Processing Technology

Class Info

Introduces the theory and technology of micro/nano fabrication. Lectures and laboratory sessions on basic processing techniques such as vacuum processes, lithography, diffusion, oxidation, and pattern transfer. Students fabricate MOS capacitors, nanomechanical cantilevers, and microfluidic mixers. Emphasis on the interrelationships between material properties and processing, device structure, and the electrical, mechanical, optical, chemical or biological behavior of devices. Provides background for thesis work in micro/nano fabrication. Students engage in extensive written and oral communication exercises.

This class has no prerequisites.

6.152 will be offered this semester (Fall 2017). It is instructed by L. F. Velasquez-Garcia and J. Michel.

Lecture occurs 2:30 PM to 4:00 PM on Mondays and Wednesdays in 32-124.

This class counts for a total of 12 credits. This class counts as a CI-M.

You can find more information on MIT OpenCourseWare at the Micro/Nano Processing Technology site or on the 6.152 Stellar site.

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Micro/Nano Processing Technology
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