2.374J Design and Fabrication of Microelectromechanical Systems
Provides an introduction to microsystem design. Covers material properties, microfabrication technologies, structural behavior, sensing methods, electromechanical actuation, thermal actuation and control, multi-domain modeling, noise, and microsystem packaging. Applies microsystem modeling, and manufacturing principles to the design and analysis a variety of microscale sensors and actuators (e.g., optical MEMS, bioMEMS, and inertial sensors). Emphasizes modeling and simulation in the design process. Students taking the graduate version complete additional assignments.
2.374J will be offered this semester (Spring 2019). It is instructed by D. Weinstein.
This class counts for a total of 12 credits.
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